Nano Fabrication Center
The Nano Fabrication Center was created in 2004 and currently serves universities, government labs and private and public companies working in areas of semiconductors, bioengineering, MEMS, optics, and thermoelectric. The Center is open and flexible, enabling researchers to endeavor in fabrication and enabling private enterprise to research, develop, prototype and produce their products.
The Cleanroom
Spanning roughly 15,000 sq. ft., the facility features a certified 6,800 sq. ft. Class 100 (ISO Class 5) cleanroom. The deionized water system can supply thousands of gallons of 18 M-ohm ultra-pure water and the in-house water treatment system can neutralize wet bench inorganic waste streams. Additionally, the facility hosts a dedicated chemical storage bunkers, gas storage areas, a mechanical shop, and a semiconductor-grade liquid/gas N₂ distribution system.