| Cleans |
| Eco-Snow |
| Spin Rinse Dryer (100mm - 150mm) |
| Spin Rinse Dryer (200mm) |
| Deposition |
| E-Beam Evaporator |
| Veeco Fiji Plasma Enhanced ALD |
| Diener Parylene Coater |
| Thermal Evaporator |
| Nitride LPCVD |
| LTO LPCVD |
| Oxidation/Anneal Furnace |
| Lesker AXXIS Sputter Deposition |
| Plasma Etch |
| Corial ICP-RIE Etcher |
| AGS RIE Etcher |
| Branson Plasma Asher |
| Lithography |
| Laurell Spin Coater |
| LP-III Vapor Prime Oven |
| Madell Hotplate |
| Blanket Exposure |
| K.S. Mask Aligner |
| ABM Mask Aligner |
| UV Cure Station |
| Metrology / Inspection |
| Alpha Step |
| JA Woolam Ellipsometer |
| Agilent Cary UV/Vis/IR Spectrophotometer |
| Filmetrics F20 Film Transparent Film Measurement |
| Filmetrics 3D |
| Goniometer |
| CDE Resmap |
| KLA-Tencor P15 |
| Shimadzu CT X-Ray |
| Signatone Probe Station Microscope |
| HLT-160 Leak Detector |
| Horiba Raman and Spectroscope |
| Packaging |
| Wedge Bonder |
| Wet Benches & Hoods |
| Wet Bench & Hood (Litho Area) |
| Solvent Hood (Litho Area) |
| Wet Bench & Hood (Chase Area) |
| Wet Bench (Chase Area) |
| DI Water Production |
| Waste Neutralization |
| UHP LN2/N2 |
| Support Equipment |
| Gas Abatement Canister |
| Nikon Microscope |
| Omax Microscope |
| BOC Drystar Pump |
| Midas Gas Detector |
| Wastewater Treatment Facility |
| GasGuard 450 Process Gas Controller |
